用雙電橋法減小壓力傳感器輸出的溫度漂移:論述了溫度對壓力傳感器輸出靈敏度的影響, 為了減小傳感器輸出的溫度漂移, 采用雙惠斯登電橋方法, 在300～ 373 K 的溫度范圍內(nèi)對傳感器進行測試, 結(jié)果表明傳感器輸出的溫度漂移可以降低70% 以上。
關(guān)鍵詞: 壓力傳感器; 溫度漂移補償; 靈敏度

Compen sa t ionM ethod of Tempera ture Dr if t in Pressure Sen sor Us ing DoubleWhea tstone-Br idgeMethod

Abstract: Th is paper deals w ith the effect of temperatu re upon the ou tpu t sen sit ivity of
the p iezo resist ive p ressu re sen so r. In o rder to reduce the temperatu re drif t of the p iezo resist ive p ressu re sen so r ou tpu t, the Doub leW heat stone2B ridgeM ethod is u sed to test thesen so r w ith the temperatu re con t ro lled at the range of 300～ 373 K. The resu lt s indicatenthat the temperatu re drif t of the sen so r ou tpu t can be low ered over 70%.
Key words: p ressu re sen so r; compen sat ion of temperatu re drif t; sen sit ivity