隨著集成電路工藝的不斷發(fā)展，工藝模擬軟件功能也在不斷的改善，本文以氧化擴散工藝為例,并在計算機上采用SUPREM-III 完成氧化擴散初始條件的編輯以及工藝模擬，并對模擬結(jié)果進行分析比較。從而對氧化、擴散工藝操作過程有直觀的了解，避免了復(fù)雜的
工程計算。
關(guān)鍵詞 SUPREM-III; 氧化擴散; 工藝模擬
Abstract With the rapid development in the process of intenrated circuits, the function of the
process simulation software has been improved constantly, Taking The oxidation and diffusion process as example, The edit of process initial condition and oxygen chemical diffusion process simulation are done on the computer. The simulation curves are also compared. and the oxidation and diffusion process can be easily seen while avoiding the complicated engineering computation.
Key words: SUPREM-III ; oxygen chemical diffusion ; process simulation