提出利用混沌進(jìn)行柔性測(cè)量的一種方法,該方法特別適用于微諧振傳感器在感測(cè)壓力、溫度變化時(shí)存在信號(hào)較弱,需要提高其靈敏度和測(cè)試分辨力的場(chǎng)合。利用系統(tǒng)從混沌狀態(tài)到大周期轉(zhuǎn)變時(shí)所表現(xiàn)出的共振鎖頻性質(zhì),進(jìn)行了微弱頻率變化信號(hào)的仿真提取。仿真證明該方法能實(shí)現(xiàn)對(duì)不同頻率變化準(zhǔn)確度的柔性測(cè)量,文中還進(jìn)一步分析了其理論基礎(chǔ),提出了驅(qū)動(dòng)力等效性觀點(diǎn)。并給出了實(shí)驗(yàn)仿真結(jié)果,表明該方法很有應(yīng)用潛力。
關(guān)鍵詞:硅微諧振傳感器; 混沌; 共振鎖頻; 柔性測(cè)量
Abstract :Flexible measure method based on the resonant frequency2locking behavior of chaos is presented. The method especially fits for detection of weak signal needed to enhance its sensitivity and resolving power in micro resonant sensor which is used to percepted pressure’s and temprature’s varitation. The simulated extraction of weak frequency variation signal is carried out with the expressed Resonant frequency2locking property when sys2
tem transits from chaotic to great periodic motion. It is verified to realize flexible measure at different frequency variation precision through simulation. The theory basis is further analyzed and the standpoint about equivalent driven force is presented.
Key words :silicon2micro2resonant sensor ; chaos ; resonant frequency2locking ; flexible measure