仿真研究了H-S 測(cè)量M 2因子等光束質(zhì)量指標(biāo)的全過(guò)程和可行性。結(jié)果表明，由H-S 測(cè)
量的圓形光束的M 2因子值與原始光束的M 2因子值基本相當(dāng)，有很好的一致性。由此認(rèn)為，H-S除了可以評(píng)價(jià)遠(yuǎn)場(chǎng)測(cè)量系統(tǒng)探測(cè)得到的光斑的各種量，比如PSF,OTF,衍射極限,環(huán)圍能量等遠(yuǎn)場(chǎng)特性，而且還可以從M 2因子來(lái)說(shuō)明光束質(zhì)量的特性。
關(guān)鍵詞：波前傳感器；光束質(zhì)量;波像差
Abstract: The whole process for measuring M 2 factor etc. beam quality indexes with Hartmann-Shack wavefront sensor and feasibility are simulated. The result show that 2 M factor value of circular beam measured with Hartmann-Shack wavefront sensor is basically consistent with the 2 M factor value of the original beam. From this we can see, apart from evaluating various spot parameters such as point spread function, optical transfer function, diffraction limit and encircle energy etc. far-field characteristics, which are obtained in detection by the far-field measuring system, the quality characteristics of beam can also be described from 2 M factor value.
Key words: Wave-front sensors；Beam quality；Wave-front aberration