提出了SiC-SBD 氣體傳感器器件分析模型，利用當(dāng)前流行的MATLAB 強(qiáng)大的計(jì)算編程功能，模擬了SiC-SBD
氣體傳感器的電流-電壓特性，結(jié)果與實(shí)驗(yàn)數(shù)據(jù)吻合很好，較好地解釋了Pd-SiC 肖特基二極管比較靈敏的原因，并根
據(jù)模擬結(jié)果提出了提高傳感器靈敏度的方法。
關(guān)鍵詞: 碳化硅；肖特基二極管；氣體傳感器；MATLAB；模型
中圖分類(lèi)號(hào): TN311.7 文獻(xiàn)標(biāo)識(shí)碼:A 文章編號(hào):1001-2028（2002）04-0006-03
Characteristics of SiC Schottky Diodes Gas
Sensors Simulated with MATLAB
ZHONG De-gang, XU Jing-ping, ZHANG Xu, YU Qian-yu, LIU Zhi-bo, YU Jun
(Department of Electronics of Science & Technology, Huazhong University of Science and Technology, Wuhan Hubei 430074)
Abstract：An analysis device model of SiC-SBD gas sensors was developed. The I-V characteristics of SiC -SBD gas
sensors were simulated by the popular and powerful MATLAB. The results exactly agree with the experiment results. In
addition, it explains why Pd-SiC Schottky diodes are more sensitive and find a way to improve the sensitivity of gas sensors.
Some approaches to increase sensibility are given based on the model.
Keyword：SiC; Schottky diodes; gas sensors; MATLAB; model