組建了一套用于半導(dǎo)體氣體傳感器的程控標(biāo)定系統(tǒng)。該系統(tǒng)使用一臺(tái)四路輸出的程控直流電源對(duì)半導(dǎo)體氣體傳感器進(jìn)行編程加熱,計(jì)算機(jī)控制質(zhì)量流量計(jì)實(shí)現(xiàn)低體積分?jǐn)?shù)被測(cè)氣體的精確配氣并實(shí)時(shí)采集傳感器的響應(yīng)信號(hào)。該系統(tǒng)可對(duì)由四支氣體傳感器構(gòu)成的陣列進(jìn)行多種工作模式的標(biāo)定。
關(guān)鍵詞: 半導(dǎo)體氣體傳感器; 標(biāo)定; 程控系統(tǒng); 質(zhì)量流量控制器; 通用接口總線
Abstract : A programmable calibration system for semiconductor gas sensors is constructed , in which a pro2 grammable DC power supply with four output channels is used to heat up gas sensors. A computer is used to con2 trol MFCs to accurately offer testing gases in low concentrations ,and to collect the responses of gas sensors in real time. The system can calibrate a sensor array consisted of four sensors operated in different model at the same
time.
Key words : semiconductor gas sensor ; calibration ; programmable system; mass flow controller (MFC ) ; gener2 al purpose interface bus( GPIB)